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Electrical measurements at the microscale: Air breakdown and silicon Coulomb blockade devices.

机译:微米级的电气测量:空气击穿和硅库仑阻挡装置。

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摘要

In this thesis I describe the work performed in two different areas of research, electrical breakdown of air for small electrode separations and measurements of silicon (Si)-based tunable-barrier single electron transistors (SETs).;In this work, I describe a new method for measuring the breakdown of air for the range of electrode separation of interest. This method has several advantages compared to ones found in the literature, namely it allows for a measurement of electrode separation before each breakdown measurement; it has a parallel plate geometry and the surface roughness of the electrodes used is very small.;Using the results obtained with this method I have made a quantitative comparison between the predictions of the standard theory of the field (field emission of electrons) and our data, something that has not been done before. In this thesis I describe analytically both the theory and the analysis of our data. I conclude that the standard theory used in this field fails for the range of electrode separations of interest (400 nm to 45 mum).;Also, I describe electrical measurements performed on a Si-based tunable-barrier device fabricated in the group of Neil Zimmerman at the National Institute of Standards and Technology (NIST) using the fabrication facilities of Cornell University. I demonstrate that this device can be operated as an SET. I continue by describing measurements of the charge offset drift (Q 0(t)) for this device and show that it is almost 3 orders of magnitude smaller than in metal devices, and comparable to previously measured Si devices of this type. All of the previously measured devices originated from the same fabrication source, NTT, Japan. Our ability to demonstrate the same low drift in devices fabricated at Cornell, USA, indicates that the small values of Q0(t) is a robust property of Si-based devices, and not sensitive to the details of fabrication.
机译:在这篇论文中,我描述了在两个不同研究领域中进行的工作,即空气的电击穿以进行小电极分离以及测量基于硅(Si)的可调势垒单电子晶体管(SET)。在感兴趣的电极分离范围内测量空气击穿的新方法。与文献中发现的方法相比,该方法具有多个优点,即,它允许在每次击穿测量之前测量电极间距;它具有平行板的几何形状,并且所用电极的表面粗糙度非常小。;使用这种方法获得的结果,我对场的标准理论(电子的场发射)的预测与我们的理论进行了定量比较。数据,以前没有做过的事情。在本文中,我将对数据的理论和分析进行分析性描述。我得出结论,在该领域中使用的标准理论无法满足感兴趣的电极间距范围(400 nm至45 mum)的要求。此外,我还介绍了在Neil组中制造的基于Si的可调势垒器件上进行的电测量美国国家标准与技术研究院(NIST)的齐默曼使用康奈尔大学的制造设施。我演示了该设备可以作为SET操作。我将继续描述该器件的电荷偏移漂移(Q 0(t))的测量结果,并表明它比金属器件小近3个数量级,并且可与之前测量的此类Si器件相媲美。所有先前测量的设备均来自相同的制造地(日本NTT)。我们有能力证明在美国康奈尔(Cornell)制造的器件中具有相同的低漂移,这表明Q0(t)的较小值是基于Si的器件的稳健特性,并且对制造细节不敏感。

著录项

  • 作者单位

    University of Maryland, College Park.;

  • 授予单位 University of Maryland, College Park.;
  • 学科 Physics Condensed Matter.
  • 学位 Ph.D.
  • 年度 2007
  • 页码 140 p.
  • 总页数 140
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 O49;
  • 关键词

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