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Low-Temperature grown Gallium Arsenide on Silicon by using Migration-Enhanced Epitaxy

机译:通过迁移增强外延在硅上低温生长砷化镓

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摘要

GaAs were grown by the migration-enhanced epitaxy (MEE) method on vicinal (001) Si substrates oriented 4 ° off towards [110] at low temperature. Investigations of crystalline and optical properties of the grown GaAs/Si were carried out by the methods of X-ray diffraction (XRD) and low-temperature photoluminescence (PL). The possible cause for tilting in the GaAs grown at low-temperature is discussed.
机译:GaAs是通过迁移增强外延(MEE)方法在低温下沿朝向[110]方向偏离4°的邻近(001)Si衬底生长的。通过X射线衍射(XRD)和低温光致发光(PL)的方法对生长的GaAs / Si的晶体和光学性质进行了研究。讨论了在低温下生长的砷化镓倾斜的可能原因。

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