High-speed and scalable, high-power VCSEL arrays and their applications

摘要

A unique architecture for two-dimensional arrays of VCSELs that allow for simultaneous high-power output and high-bandwidth modulation has been developed for a variety of applications. The arrays use integrated micro-lenses for beam shaping and control, and to enable incoherent beam combining to make compact, high-brightness sources with low coherence noise. The fabrication and performance of the laser arrays are reviewed and sample applications are discussed.