Magnetron Sputtering Fabrication of the Back Electrode of Glass Nanofluidic Diode

摘要

Due to the scale of nanofluidic diode equivalent to biologic molecule,many unique characteristics appeared as the micorfluidic channel narrowed its size to nanometer. The fabrication was even more different. According to the design of nanofluidic diode chips,the sketch of back electrode was designed with a mask. Then magnetron sputtering method was used to fabricate the back electrodes. The manufacturing parameters were discussed and optimized through SEM characterizations. The results can direct the fabrication process of such metal electrodes.