Optical performance and characterization of an EUV and soft x-ray test facility

摘要

Abstract: An ultra-high vacuum test facility to characterize optics, coatings and detectors in the EUV and soft X-ray (38 eV - 10 keV) spectral region is presented. The system consists of a 30 1 test chamber which can be coupled with two different beamlines: it accommodates two rotators in the 0 - 20 configuration for reflectivity and diffraction efficiency measurements on optics at grazing incidence up to 6 degrees. The low-energy beamline consists of a grazing incidence spherical grating monochromator optimized for the 38 - 1000 eV spectral range. The design is based on the principle to scan the external spectrum by rotating the grating and to maintain the spectral focusing on the exit slit by changing the length of the entrance arm. Two configurations are presented for the 38 - 200 eV (160 degree deviation angle) and the 180 - 1000 eV (172 degree deviation angle) region. The high-energy beamline is optimized for the 1.5 - 10 keV range: it consists of a facility mounting the soft X-ray source and a thin filter of the same material as the emitting anode. The results of the characterization in the whole spectral region are presented. Examples of measurement of the detection efficiency of EUV and soft X-ray detectors are discussed. !10