MEASURING MACHINES WITH INTERFEROMETRICAL STYLUS FOR FORM MEASUREMENT OF PRECISE MECHANICAL PARTS

摘要

An interferometrical stylus system for form measuring machines which allows form and diameter measurements on precision mechanical parts with tolerances of less than 1um has been developed, built, tested and already used under shop floor conditions.rnThe optical system is based on a novel concept of short coherence heterodyne interferometry and achieved distance equivalent noise level of 1a < 1nm with a sampling frequency of 10kHz.rnIn order to examine the measuring capability of the system for tolerances smaller than 1 urn we developed dedicated process algorithms and performed a substantial amount of test measurements.rnThe interferometrical stylus is already working in following machines:rn1. Mahr MFU100WP for universal measurementsrn2. Bosch FMS 1000 for fast measurements near the production linern3. Mycrona ALTERA Nano for measuring of small structuresrnFurther a special software for post measurement visualization and processing of 3D interfrometrical data has been developed.