DEVELOPMENT OF A SENSITIVE 3-AXIS ANGLE SENSOR BASED ON LASER AUTOCOLLIMATION

摘要

The following conclusions are drawn from thisrnstudy:rn[ⅰ] A measurement method for simultaneous three-axis angular displacements based on laser autocollimation has been proposed, [ⅱ] Three-types of measurement methods for simultaneous three-axis angle have been proposed. To estimate these measurement methods, prototype I was developed. The dimension of the Prototype I was 86.0 mm × 56.3 mm × 59.0 mm (W × L × H).rn[ⅲ] The new type of three-axis angle sensor called Prototype II was also developed inrnMethod 2. The dimension of this sensor was 64.0 mm × 65.0 mm × 59.0 mm (W × L × H). The resolutions/ranges of the sensor in Δθ_X, Δθ_Y and Δθ_Z -directions were ±0.1 arc-seconds/±200 arc-seconds, ±0.02 arc-seconds/±20 arc-seconds and ±0.02 arc-seconds/±20 arc-seconds, respectively. The future work might deal with evaluating the accuracy of the three-axis angle sensor.