MICRO AND NANO ASSEMBLY TOOLS UTILIZING STANDING WAVE TECHNOLOGY

摘要

This paper will present some observations drawn from our ongoing investigations into the use of standing wave probes for micro-manipulation tools. Generally, a manipulation system will comprise one or more probes that can be maneuvered, like fingers, to pick up and place small components. Such multi-probe devices are often referred to as grippers and/or tweezers. FIGURE 1 is a schematic diagram indicating the major components the tweezers being used to grip a specimen on a substrate. The tweezers is shown in this case as two fibers. The contact forces between components are indicated with the subscripts G referring to the tweezers (fingers 1 or 2) and specimen, S between specimen and substrate and n and t discriminating normal or tangential forces respectively. In this work, the fingers of the tweezers are built from a tuning fork crystal resonator and a 3 mm long 7 μm diameter carbon fiber, see FIGURE 2. Performance and details of operation can be found in [1] while the use of these probes for tweezers applications is discussed in [2].