HIGH ACCURACY ATOMIC FORCE MIRCOSCOPE FOR DIMENSIONAL METROLOGY

摘要

The high accuracy atomic force microscope demonstrated its ability to control the position of a moving stage to 0.25 nm RMS noise. Although we can not directly measure the lateral position of the stage, our calculations show that the microscope is capable of achieving 1 nanometer accuracy positioning amidst all mechanical, thermal, and electrical noise sources. Further research is required to demonstrate 1 nanometer surface tracking with the Akiyama probe. The variation between the Akiyama probes as well as their hysteretic behavior will have to be addressed in the future in order to ultimately reach this goal.