NOVEL SWITCHING CONTROL OF THE BALL-SCREW DRIVEN STAGE FOR NANO POSITIONING

机译：用于纳米定位的滚珠丝杠驱动级的新型切换控制

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摘要

This paper presents a novel switching control method using the NCTF control as coarse mode, and PID control as fine mode for the ball-screw driven positioning stage. Experiment results show the resolution of the ball-screw stage within nanometer and in 100mm step response, the motion error attenuates to about 0.6nm.

机译：本文提出了一种新颖的切换控制方法，该方法以滚珠丝杠驱动的定位级为粗略模式，以PID控制为精细模式。实验结果表明，滚珠丝杠平台的分辨率在纳米范围内，并且在100mm阶跃响应下，运动误差衰减至约0.6nm。

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《The Twenty-third annual meeting of the American Society of Precision Engineering and the Twelfth ICPE》|2008年|253-256|共4页
会议地点 Portland OR(US);Portland OR(US);Portland OR(US);Portland OR(US)
作者
Gyu-Ha Kim; Sang-Gu Cho; Wan-Soo Kim; Sun-Kyu Lee;
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作者单位

Department of Mechatronics Gwangju Institute of Science and Technology (GIST) Buk-gu, Gwangju, Republic of Korea;

Technical Research Center HYUNDAI STEEL COMPANY Dangjin-gun, Chungchengnam-do, Republic of Korea;

Department of Mechatronics Gwangju Institute of Science and Technology (GIST) Buk-gu, Gwangju, Republic of Korea;

Department of Mechatronics Gwangju Institute of Science and Technology (GIST) Buk-gu, Gwangju, Republic of Korea;

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正文语种 eng
中图分类仪器、仪表;
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1. Vibration control of a flexible beam driven by a ball-screw stage with adaptive notch filters and a line enhancer [J] . Wu Shang-Teh, Lian Sing-Han, Chen Sheng-Han Journal of Sound and Vibration . 2015,第Null期

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2. Switching Gain-Scheduled Control Design for Flexible Ball-Screw Drives [J] . Masih Hanifzadegan, Ryozo Nagamune Journal of Dynamic Systems, Measurement, and Control . 2014,第1期

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3. Tracking Error Constrained Terminal Sliding Mode Control for Ball-Screw Driven Motion Systems with State Observer [J] . Park Soo-Chang, Lee Jang-Myung, Han Seong-Ik International Journal of Precision Engineering and Manufacturing . 2018,第3期

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4. NOVEL SWITCHING CONTROL OF THE BALL-SCREW DRIVEN STAGE FOR NANO POSITIONING [C] . Gyu-Ha Kim, Sang-Gu Cho, Wan-Soo Kim, Annual Meeting of The American Society for Precision Engineering . 2008

机译：纳米定位滚珠丝杠驱动级的新型开关控制
5. Robust control and characterization of nonlinear microdynamics in a ball-screw driven slide system. [D] . Shim, Wonbo. 2000

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8. Nonlinear Control Design for a Piezoelectric-Driven Nanopositioning Stage [R] . Oates, W. S. , Smith, R. C. 2005

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NOVEL SWITCHING CONTROL OF THE BALL-SCREW DRIVEN STAGE FOR NANO POSITIONING

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