INVESTIGATION OF AIR DAMPING AND Q IN A MEMS RESONANT MASS SENSOR

摘要

Squeeze film damping can have a deleterious effect on resonator device performance. This paper has shown how air pressure, gap, and holes in the cantilever affect the resonator's Q factor. When it is impractical to package a resonating device in vacuum, gap size and hole size and placement may be designed to improve performance. There will be limits to increasing the gap and increasing the hole area. Both would increase the actuation voltage in an electrostatically actuated device. Also, greater hole area reduces the surface area available for binding to chemicals of interest.