FABRICATION OF MICRO ASPHERICAL LENS ARRAY USING FAST TOOL SERVO WITH TOOL PATH COMPENSATION

摘要

In this study the micro aspherical lens array with 60μm sag, 30mm basic radius and -1 conicrncoefficient was cut by Precitech FF705XG diamond turning machine with fast tool servo and measured by Panasonic UA3P-4. The measurement results show that the micro aspherical lens array fabrication using FTS with over cutting depth compensation could get acceptable form accuracy less than 0.3μm. It means the micro lens design will be more flexible on iust the SDherical surface.