PERFORMANCE OF A 2D SPECKLE DISPLACEMENT SENSOR WITH VARIOUS MEASUREMENT SURFACES

摘要

We have demonstrated the performance of a 2D speckle based displacement sensor with various measurement materials. The sensor in its present form is capable of <0.7 nm of fixed position noise, and accuracy and reproducibility of <±100 nm over a 250 μm × 250 μm measurement range with various measurement materials. 2D displacement measurements directly on native planar surfaces give this sensor a distinct advantage over other technologies. Trade offs in performance parameters (e.g. range/resolution) can be made to tailor the sensor to various applications.