ULTRA PRECISION MACHINING DISTURBANCE FREQUENCY EXTRACTION FROM FINISHED SURFACE METROLOGY

摘要

For diamond face turning, it has been demonstrated with simulation that disturbance frequency causing a waviness error can be discerned from a surface measured via a Zygo image using spatial FFT information in the feed direction. This methodology presents the potential to understand and correct disturbances responsible for creating unwanted waviness patterns on diamond face turned surfaces.