ULTRA FINE TOOL SERVO SYSTEM

摘要

The main objective of this paper is to develop an innovative piezoelectric-based ultra Fine Tool Servo (FTS) system for a miniature ultraprecision lathe. The FTS system was designed for generating micro-feature surfaces on small-sized workpieces and for measuring the thrust force along the in-feed direction by a built-in force sensor during diamond turning process. The developed ultra FTS systems established the new concept of the flexure structure design comprising the actuator with capability of measuring the micro-Newton thrustrnforce. The flexure structure design is totally different from the design of fast tool servo that is found in the literature.rnFrom the experimental results, the ultra FTS system is found to be able to machine the commanded waveform profile accurately and with good surface roughness of less than 10 nm. Besides, the thrust force can effectively illustrate the machining phenomenon during the machining process.