PARALLEL-KINEMATICS MEMS STAGES FOR HIGH PRECISION NANOPOSITIONING AND MANIPULATION

摘要

Micro Electro Mechanical Systems (MEMS) based micro-positioning stages are critically important in many microano manipulation and manufacturing applications. Such stages have been extensively used in micro-force sensors, scanning probe microscopy and micro optical lens scanners [1-4]. While there is no unique definition for a micro-positioning stage, it generally refers to a system which can automatically move an end effector with certain degrees of freedom (DOF) in its work zone and maintain submicron positioning resolution. For a micropositioning stage, it is desirable to have a large work zone, high resolution, and high bandwidth simultaneously.