Buried passive elements manufactured in LTCC

摘要

Electrical performance of LTCC buried 3D inductors and capacitorsnwas tested. The circuits tested were multilayer wire patterns occupyingneight layers of DuPont 951AX. The motivation of this study was to findnout the available Q, C and L of LTCC buried lumped elements. The effectnof shielding electrical ground on lumped element parasitics was ofnparticular interest. A result to be pointed out is the inductor designnrule for highest possible Q*L/size for the tested double helicalninductor structure. Maximum measured Q for 6.0 nH inductor was 83. Thencorresponding size was 3.5×3.5×1.6 mm³