The Integrated Unit for MEMS Based Pressure Measurement

摘要

The article deals with a custom based integrated measurement unit (IMU), which serves as processing device for MEMS based pressure measurement. The IMU consists of the three elementar stages, measurement stage, processing stage and communication stage. They are implemented on the one single board. The measurement block has 16-bit resolution with 64 provided measurement ranges to satisfy appropriate accuracy. The power supply is 5 V, which allows to measure current with 238 nA step within 1 mA measurement range. The communication stage is based upon 12C standard.