首页> 外文会议>Symposium on Thin-Films - Stresses and Mechanical properties Vii, held December 1-5, 1997, Boston, Massachusetts, U.S.A. >Observation of dislocation disappearance in aluminum thin films and consequences for thin-film properties
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Observation of dislocation disappearance in aluminum thin films and consequences for thin-film properties

机译:观察铝薄膜中的位错消失及其对薄膜性能的影响

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Dislocation structures in Al-Cu thin films have been studied by transmission electron microscopy (TEM). We have observed that the contrast of interface dislocations disappears in the electron beam. We assume that the contrast dissolution is due to the spreading of the dislocation core at the crystalline/amorphous interface or due to a diffusive movement of the dislocation through the oxide. In any case, the relaxation is assumed to be controled by irradiation induced diffusion. As a consequence, the short range stresses and at least partly also the long range stresses of the dislocations relax. This relaxation changes the interaction force between dislocations and may thus significantly affect the mechanical properties of thin films. It is concluded that interaction between interface dislocations may not be responsible for the high temeprature strength of aluminum films.
机译:已经通过透射电子显微镜(TEM)研究了Al-Cu薄膜中的位错结构。我们已经观察到界面位错的对比度在电子束中消失了。我们假设对比溶解是由于位错核在晶体/非晶界面上的扩散或由于位错通过氧化物的扩散运动所致。在任何情况下,假定弛豫由辐射诱导的扩散控制。结果,位错的短程应力和至少部分长程应力也松弛。这种弛豫改变了位错之间的相互作用力,从而可能显着影响薄膜的机械性能。结论是,界面位错之间的相互作用可能与铝膜的高拉伸强度无关。

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