首页> 外文会议>Symposium on Thermoelectric Materials-New Directions and Approaches March 31-April 3, 1997, San Francisco, California, U.S.A. >Structural and optical properties of beta -FeSi_2/Si(100) prepared by laser ablation method
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Structural and optical properties of beta -FeSi_2/Si(100) prepared by laser ablation method

机译:激光烧蚀法制备的β-FeSi_2 / Si(100)的结构和光学性质

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beta -FeSi_2 is a promising material for the application of varous electronic, optoelectronic and energy devices. We present here the semiconducting properties of beta -FeSi_2 films on Si(100) substrate prepared by laser ablation method. Samples were grown using poly-crystalline bulk beta -FeSi_2 prepared by horizontal gradient freeze method. For the monitoring of growth, in-situ observation of ablation plume was made through fluorescence spectroscopy. Reflection of high-energy electron beam diffraction (RHEED) was also made in-situ to see the surface morphology. Characterization of the films by X-ray diffraction presented purely beta (220) orientation. Raman scattering measurements at room temperature also indicated that the grown films are semiconducting beta -Fe-Si_2. Optical absorption spectra at room temperature showed absorption ocefficient higher than 10~5 cm~(-1) above the band-gap (approx 1.2 eV). It was revealed that high quality semiconducting beta -FeSi_2 films can be fabricated by laser ablation method without post-annealing.
机译:β-FeSi_2是用于各种电子,光电和能源设备的有前途的材料。我们在这里介绍通过激光烧蚀方法制备的Si(100)衬底上的β-FeSi_2薄膜的半导体性能。使用通过水平梯度冷冻法制备的多晶块状β-FeSi_2来生长样品。为了监测生长,通过荧光光谱原位观察了消融羽流。高能电子束衍射(RHEED)的反射也就地进行,以观察其表面形态。通过X射线衍射表征的薄膜呈现出纯粹的β(220)取向。室温下的拉曼散射测量还表明,生长的薄膜是半导体β-Fe-Si_2。室温下的光吸收光谱表明,其吸收系数高于带隙(约1.2 eV),高于10〜5 cm〜(-1)。揭示了可以通过激光烧蚀方法制造高质量的β-FeSi_2半导体薄膜,而无需进行后退火处理。

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