Diffusion barriers for copper metallization: predicting phase stability and reactivity using equilibrium thermodynamics

摘要

The guidelines for designing a conductive, amorphous material, capable of thermodynamic equilibrium with copper, are defined using readily available thermodynamic information. The tradeoff between desired properties- equilibrium at the interfaces, amorphous microstructure, and electronic conductivity - are described, along with trends i relevant binary systems that result in these properties. These guidelines defined systems for experimental study, for which preliminary results are presented.