MEMS Thermal Shear-Stress Sensors: Experiments, Theory and Modeling

摘要

We have made many versions of MEMS thermal shear-stressrnsensors which have received successful applications. However, itrnhas been found that the classical theory for conventional thermalrnshear-stress sensors is inapplicable to MEMS sensors. This paperrnthen presents a systematic study of this issue and for the first time,rnan adequate theoretical analysis of MEMS sensors is developedrnand examined by experiments. The resulting 2D MEMS shearstressrnsensor theory, which includes heat transfer effects ignoredrnby the classical theory, is verified by experimental data. We alsornperform 3D heat transfer simulation and the results agree with therntesting data and support the proposed new theory.