A HIGH FREQUENCY HIGH FLOW RATE PIEZOELECTRICALLY DRIVENMEMS MICROPUMP

摘要

A piezoelectrically driven fluidic micropump was fabricatedrnand tested. Microelectromechanical systems (MEMS) fabricationrntechnology was used. Small cylindrical piezoelectric materialrnelements were integrated with microfabricated silicon, silicon onrninsulator (SOI), and glass chips using eutectic bonding and anodicrnbonding processes. SO1 wafers were used to form the thinrnmembranes within the moving parts (a drive element and twornpassive valves). The design, microfabrication process, andrnassembly of the device are described in this paper. Fabricationrnissues such as control of fillet radii at the feet of the Si membranesrnfor stress reduction and simultaneous eutectic and anodic bondingrnwere discussed. A flow rate as high as 3000 ul/min was recorded.rnExperimental and simulation results of the dependences of thernpump flow rate on the voltage and frequency applied on thernpiezoelectric material are shown and discussed.