Micro-Opto-Electro-Mechanical Systems

摘要

The Micro-Electro-Mechancial Systems (MEMS) technology has opened up many new opportunities for optics. For the first time, reliable microactuators and three-dimensional optomechanical structures can be monolithically integrated with micro-optical elements. This new technology will impact many applications including display, scanning, and telecommunications. In this paper, we will discuss two applications of MEMS: Optical systems on a chip, and scalable optical switches for optical crossconnect.