Silicon Microfabrication Technologies for Nano-Satellite Applications

摘要

Silicon (Si) has a strength to density ratio of 3.0(σ_y/δ=(6.8Gpa/2.3g/cc)), an order-of-magnitude higher than titanium, aluminum, or stainless steel. Silicon also demonstrates favorable thermal, optical, and electrical properties making it ideal for use as a structural foundation for autonomous, mesoscopic systems such as nanosatellites. Using Si substrates, a structure that can simultaneously act as a thermal management system, a radiation shield, an optical material, a package, and a semiconductor substrate can be realized.