Measurement of thicknesses and refractive indices by low-coherence confocal interferometric microscopy

摘要

Abstract: In this paper we first survey non-contacting measurement of thickness and refractive index of transparent plates and films. Especially, the separation of these two quantities are focused on. Then we explain the principle and the apparatus for separate measurement of refractive index and geometrical thickness, which are also applicable to multiple layers. In addition, several application examples of this method are also presented.!21