MULTISENSOR-BASED MONITORING SYSTEM FOR MEM

摘要

In order to improve the availability and productivity of the prototype manufacturing system, modern control system was adopted. This paper mainly focuses on the multisensor-based manufacturing process monitoring system of the control system used on MEM. Also a way using Monte Carlo method to improve the reliability of the temperature sensor was presented. The general structure of the monitoring system and the use of Monte Carlo method are discussed in detail.