The Research and Construction of an Ultraprecision Air Bearing Work Spindle System

摘要

The paper presents a newly-developed air bearing work spindle applied in the Nanosys-300 system, an aspheric surfaces Ultraprecision machining system. In addition, the corresponding technical parameters and the technical measures adopted in the process of manufacture are also investigated. The theoretical study and the practical application shows that the concerned air bearing spindle satisfies the design requirements and can be applied in the practical Ultraprecision production.