Laser Microfabrication System to Process Micromachine

摘要

In MEMS manufacture field laser microfab-rication has great advantage. In this paper the excimer laser system with mask project lithograph for micro-processing developed by authors was introduced. With this system the micro gears which diameters are less than 100μm were made. The selective laser sintering rapid fabrication for micro fabrication was also introduced. With this micro processing system the micro Chinese character which is as small as a tip of match is produced with powder laser sintering technology.