Thermal Error of Ultra-precision Machine Tool and Its Compensation

摘要

In this paper the thermal error of ultra-precision, machine tool and its influence for the machining accuracy are analyzed. The concept of passive compensation and active compensation for thermal error is established. Passive compensation is avoiding thermal error by temperature stabilization, while active compensation is elimination of thermal error according to the temperature change. A study on active compensation for ultra-precision machine tool FAG-1 has been performed. Thermal deformation model and the compensation method are studied. At last it is a experiment.