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Analyses of femtosecond laser ablation of Ti, Zr and Hf

机译:飞秒激光烧蚀Ti,Zr和Hf的分析

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Femtosecond laser ablation of Ti, Zr and Hf has been investigated by means of in-situ plasma diagnostics. Fast plasma imaging with the aid of an intensified charged coupled device (ICCD) camera was used to characterise the plasma plume expansion on a nanosecond time scale. Time- and space-resolved optical emission spectroscopy was employed to perform time-of-flight measurements of ions and neutral atoms. It is shown that two plasma components with different expansion velocities are generated by the ultra-short laser ablation process. The expansion behaviour of these two components has been analysed as a function of laser fluence and target material. The results are discussed in terms of mechanisms responsible for ultra-short laser ablation.
机译:飞秒激光烧蚀Ti,Zr和Hf已通过原位等离子体诊断进行了研究。借助于增强的电荷耦合器件(ICCD)相机进行的快速等离子体成像被用来表征纳秒级的等离子体羽流膨胀。使用时间和空间分辨的光发射光谱法对离子和中性原子进行飞行时间测量。结果表明,超短激光烧蚀工艺产生了两种具有不同膨胀速度的等离子体成分。这两个组件的膨胀行为已根据激光能量密度和目标材料进行了分析。根据造成超短激光烧蚀的机制讨论了结果。

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