PULSED ELECTRON BEAM ABLATION OF FERROELECTRIC MATERIALS. SPECTROSCOPIC INVESTIGATION

摘要

A compact pulsed electron beam source based on a channel-spark discharge was studied with the aim to find the optimum operating conditions for an efficient ablation of ferroelectric materials for thin-film deposition. The ablation plasma was studied by time-resolved optical emission spectroscopy. The temporal evolution of the spectral lines of target material and working gas was monitored. In the present discharge configuration a long lasting plasma is characteristic, as proved by the temporal evolution of excited atoms and ions.