Development of 3-Axis Flexure Stage for Bio-Cellular Experimental Apparatus

摘要

The authors discuss the design and implementation of a precision flexure mechanism for a non-contact bio-cellular experimental apparatus called magnetic tweezer (MT). MT manipulates a magnetic particle of several-micron diameter by magnetomotive force, diverged from magnetic poles to stimulate a target cell to measure its mechanical property. The developed flexure stage was designed to satisfy a strict size limitation to be assembled in a conventional microscope, and to make MT a practical experimental apparatus. The design concept and series of analysis were discussed to satisfy practical requirements on working range and mechanical stiffness. Motion control experiment using a 3D-visual servoing was performed to evaluate the control accuracy and to demonstrate validity and effectiveness of the developed system.