SURFACE MORPHOLOGY FOR HYDROGEN TRANSFERRED AND THINNED BY OXIDATION SOI LAYERS

摘要

The aim of the effort was understanding of the surface morphology of (100) Si surface splitted by implanted hydrogen upon annealing, its change during thinning procedure with layer-by-layer oxidation, and ultimately exacting control over the surface and interface roughness. We present an experimental investigation of the surface evolution and scaling of SOI thin film surfaces during production and thinning, studied by AFM surface analysis using a box method as well as Fourier power spectrum determination. It was shown that as splitted surface has faceted structures due to heterogeneous nucleation of (111) microcracks during [110] cleavage front propagation.