PATTERNING OF CERAMICS -SITE-SELECTIVE DEPOSITION OF CERAMIC THIN FILMS USING SELF-ASSEMBLED MONOLAYERS

摘要

Site-selective deposition (SSD) and nano/micropatterning of ceramic thin films were realized in the solutions using self-assembled monolayers(SAMs). The processes were developed based on scientific knowledge obtained from investigations of interactions and chemical reactions between functional groups of SAMs and ions, clusters and homogeneously nucleated particles in solutions. Several conceptual processes for SSD using SAMs as templates were proposed, and nano/micropatterns of ceramic thin films such as TiO_2, ZnO, Fe_3O_4, SrTiO_3, Ta_2O_5, SnO_2, ZrO_2, hydroxyapatite, etc. were successfully fabricated. Molecular recognition of SAMs was effectively used to achieve high site-selectivity. Our proposals and investigations will contribute to the development of SSD for the fabrication of nano/micropatterns of thin films. The studies showed the good performance of environment-friendly chemistry such as Green & Sustainable Chemistry for the fabrication of nano/micro ceramic devices.