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Influence of bilayer processing on p-i-n OLEDs: towards multicolor photolithographic structuring of organic displays

机译:双层工艺对p-i-n OLED的影响:走向有机显示器的多色光刻结构

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摘要

Recently, bilayer resist processing combined with development in hydrofluoroether (HFE) solvents has been shown to enable single color structuring of vacuum-deposited state-of-the-art organic light-emitting diodes (OLED). In this work, we focus on further steps required to achieve multicolor structuring of p-i-n OLEDs using a bilayer resist approach. We show that the green phosphorescent OLED stack is undamaged after lift-off in HFEs, which is a necessary step in order to achieve RGB pixel array structured by means of photolithography. Furthermore, we investigate the influence of both, double resist processing on red OLEDs and exposure of the devices to ambient conditions, on the basis of the electrical, optical and lifetime parameters of the devices. Additionally, water vapor transmission rates of single and bilayer system are evaluated with thin Ca film conductance test. We conclude that diffusion of propylene glycol methyl ether acetate (PGMEA) through the fluoropolymer film is the main mechanism behind OLED degradation observed after bilayer processing.
机译:近来,已经证明双层抗蚀剂处理与在氢氟醚(HFE)溶剂中的开发相结合能够实现真空沉积的最新有机发光二极管(OLED)的单色结构。在这项工作中,我们专注于使用双层抗蚀剂方法实现p-i-n OLED的多色结构化所需的其他步骤。我们显示,绿色磷光OLED叠层在HFE中剥离后不会受到损坏,这是实现通过光刻技术构造的RGB像素阵列的必要步骤。此外,我们根据器件的电学,光学和寿命参数,研究了双抗蚀剂处理对红色OLED的影响以及器件在环境条件下的曝光。此外,单层和双层系统的水蒸气透过率通过薄的Ca膜电导测试进行评估。我们得出结论,丙二醇甲醚乙酸酯(PGMEA)通过含氟聚合物薄膜的扩散是在双层处理后观察到的OLED降解的主要机理。

著录项

  • 来源
    《Organic photonic materials and devices XVII》|2015年|93600W.1-93600W.10|共10页
  • 会议地点 San Francisco CA(US)
  • 作者单位

    Institut fuer Angewandte Photophysik, Technische Universitaet Dresden, 01062 Dresden, Germany;

    Institut fuer Angewandte Photophysik, Technische Universitaet Dresden, 01062 Dresden, Germany;

    Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01109 Dresden, Germany;

    Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01109 Dresden, Germany;

    Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01109 Dresden, Germany,Department of Physics, Texas State University, San Marcos, TX 78666, USA;

    Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01109 Dresden, Germany;

    Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01109 Dresden, Germany;

    Institut fuer Angewandte Photophysik, Technische Universitaet Dresden, 01062 Dresden, Germany;

    Institut fuer Angewandte Photophysik, Technische Universitaet Dresden, 01062 Dresden, Germany;

    Institut fuer Angewandte Photophysik, Technische Universitaet Dresden, 01062 Dresden, Germany;

    Institut fuer Angewandte Photophysik, Technische Universitaet Dresden, 01062 Dresden, Germany;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    OLED; doped organic films; photolithography; hydrofluoroethers; bilayer processing;

    机译:OLED;掺杂有机薄膜光刻;氢氟醚;双层处理;

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