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Integrated electro-optic devices of melt-processable single-crystalline organic films

机译:可熔融加工的单晶有机膜的集成电光器件

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Organic electro-optic (EO) materials are the materials of choice for high speed optical modulators with modulation frequencies greater than 100 GHz. This is due to the large EO effects observed and a low material dispersion of the dielectric constant resulting in a very small velocity mismatch between the optical and electrical waves. However, the implementation of organic materials into real devices has been hindered by several factors such as an insufficient long-term thermal and photochemical stability of the widely investigated poled polymers or the lack of available structuring techniques for the inherently superior organic EO crystalline materials. Here we report on the realization of integrated organic EO single-crystalline Mach-Zehnder modulators by a recently developed melt based channel growth technique. The main fabrication concept is to grow the organic EO single-crystals from the melt directly in pre-structured and electroded waveguide channels, which were obtained by standard optical lithographic techniques and wafer bonding. By this method single crystal structure details with a size below 30 run have been achieved and the growth of single-crystalline Mach-Zehnder modulators has been successfully demonstrated, where we have chosen DAT2 (2-(3-(2-(4-dimethylaminophenyl)vinyl)-5,5-dimethylcyclohex-2-enylidene)malononitrile) as EO material. The half-wave voltage x length product determined in the DAT2 based Mach-Zehnder modulators has been found to be 78 ± 2 Vcm for TE-modes and 60 ± 1 Vcm for TM-modes at a wavelength of 1.55 urn. The accuracy and reproducibility of the process allowed also for the realization of the first EO single-crystalline microring resonator in an organic material.
机译:有机电光(EO)材料是调制频率大于100 GHz的高速光学调制器的首选材料。这是由于观察到的大的EO效应和介电常数的低材料分散性导致光波与电波之间的速度失配非常小。然而,有机材料在实际设备中的实现受到多种因素的阻碍,例如被广泛研究的极性聚合物的长期热和光化学稳定性不足,或者缺乏固有的优异有机EO晶体材料的可用结构化技术。在这里,我们报告通过最近开发的基于熔体的通道生长技术实现集成有机EO单晶马赫曾德尔调制器的过程。主要的制造概念是从熔体中直接在预构造和带电极的波导通道中生长有机EO单晶,这些通道是通过标准的光刻技术和晶圆键合获得的。通过这种方法,已经获得了尺寸小于30nm的单晶结构细节,并且已经成功地证明了单晶马赫曾德尔调制器的生长,我们选择了DAT2(2-(3-(2-(4-(4-二甲基氨基苯基)乙烯)-5,5-二甲基环己-2-烯叉)丙二腈)作为EO材料。已经发现,在基于DAT2的Mach-Zehnder调制器中,波长为1.55 um的TE模式的半波电压x长度乘积为78±2 Vcm,而TM模式的为60±1 Vcm。该方法的准确性和可重复性还允许在有机材料中实现第一个EO单晶微环谐振器。

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