Abstract: Scattering optical waveguide microscopy is a novel imaging technique, that allows for the microscopic characterization of thin film samples by using the evanescent field of a guided optical wave as the illuminating light source. The image contrast is generated by the scattered intensity of the thin film sample within the evanescent field. Excellent lateral resolution ($LS 1 $mu@m) is demonstrated for an evaporated SiO$-x$/ grating. Immersion microscopy has been performed with an additional cuvette in the same setup. The contrast of the image is investigated with respect to mode number and polarization of the illuminating, propagating waveguide mode and the surface roughness of the sample.!14
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机译：摘要：散射光波导显微镜是一种新颖的成像技术，它可以通过使用引导光波的e逝场作为照明光源来对薄膜样品进行微观表征。图像对比度是由薄膜样品在渐逝场内的散射强度产生的。蒸发后的SiO $ -x $ /光栅具有出色的横向分辨率（$ LS 1 $ mu @ m）。浸没显微镜已经在相同的设置中用另外的比色皿进行了。就模式数和照明，传播波导模式的偏振以及样品的表面粗糙度来研究图像的对比度！14
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