Properties of the DMD digital micromirror device for new emerging applications in optical engineering

摘要

The paper describes the basics of an active MEMS device that powers millions of business projector devices and consumer HDTV sets but offers much more for general optics. The structure and the operating principle of this MEMS spatial light modulator will be described. Addressing new emerging applications in optical engineering, specifications and features of the MEMS and the supporting chipset are presented.