Analysis of three different measurement strategies carried out with the TII-3D coordinate measurement system

摘要

Together with the group of interferometry based systems, coordinate measurement machines are an essential part of the metrology in the modern optical industry. Coordinate measurement machines commonly consist of a multi axes framework. They are designed to operate in a defined three dimensional work zone, where every possible point can be reached by the measurement tool tip. This basic design principle leads to some interdependent challenges. A detailed measurement result needs a large amount of measurement points to detect even minor irregularities and short-wave errors. However, a rising of the amount of measurement points increases the corresponding measurement time analogous. On the other hand, the extended operation time increases the access of undesired thermal and dynamic influences, which cause multiple errors to the measurement result. Furthermore, modern production processes need rapid metrology systems to aid the machining time. This paper discusses results obtained by operating with three different measurements in order to find an agreement between speed and certainty of the coordinate measurement machine. The topographic coordinate measurement system TII-3D had been re-developed at the University of Applied Sciences Deggendorf in the laboratory of optical Engineering and it is equipped with three different measurement strategies. The first mode, the Track-Mode operates in concentric circles on top of the surface of the object to be measured. The Spiral-Mode measures along a dynamic moveable spiral line and the Section-Mode produces multiple cross-sections. The results of this paper may be useful for the future design of measurement machines in general.