Modeling of an Electroactive Polyimide Ultrasonic Wave Sensor for Aerospace Applications

摘要

We have developed a new, low cost polyimide Capacitive Micromachined Ultrasonic Transducer (CMUT). The device will be constructed using an electroactive polyimide membrane and the PolyMEMS fabrication process developed at Virginia Commonwealth University. We have modeled the device to determine the deflection for a known pressure differential and to determine the minimum, maximum, and nominal capacitance that the device will generate. We have modeled the modes of vibration of the device and have investigated the strain induced during operation. This paper presents the results of the electromechanical modeling of this new device.