STRUCTURE AND PROPERTIES MULTILAYERED MICRO- AND NANOCOMPOSITE COATINGS OF Ti-N-Al/Ti-N/Al_2O_3

摘要

This paper presents the first results on formation and stud ing of structure and properties of nanocomposite combined coatings. By means of the deposition processes modeling (deposition conditions, current density-discharge, plasma composition and density, voltage) we formed the three-layer nanocomposite coatings of Ti-Al-N/Ti-N/Al_2O_3/.The coating composition, structure and properties were studied using physical and nuclear-physical methods. The Rutherford proton and helium ion back scattering (RBS), Scanning Electron Microscopy with microanalysis (SEM with EDS and WDS), X-Ray diffraction (XRD) including a grazing incidence beam to 0.5°, as well as nanohardness tests (hardness) were used for analysis. Measurements of wear resistance, corrosion resistance in NaCl, HC1 and H2SO4 solution were also performed. To test mechanical properties such characteristics of layered structures as hardness H, elastic modulus E, E~1/E~2 etc. were measured. It was demonstrated that the formed three-layer nanocomposite coatings had hardness of 32 to 36 GPa, elastic modulus of 328 ±18 to 364 ±14 GPa. Its wear resistance (cylinder-surface friction) increased by a factor of 17 to 25 in comparison to the substrate (stainless steel). The lasers thickness was in the range of 56 - 120 urn.