High-Performance Transparent, Flexible Inorganic-Organic Hybrid Thin-Film Transistors Fabricated at Room Temperature using n-Type In_2O_3 Semiconducting Films

摘要

High-performance inorganic-organic hybrid thin-film transistors (TFTs) are fabricated using semiconducting In_2O_3 thin-film deposited at room-temperature by ion-assisted deposition and thin organic dielectrics grown at near-room temperature. These hybrid TFTs combine the advantages of a high-mobility inorganic semiconductor with high-capacitance organic gate dielectrics. In_2O_3 thin-films exhibit high optical transparency in the visible region, a wide band gap, and smooth morphologies. Furthermore, the present In_2O_3 films are compatible with both inorganic dielectrics and nanoscopic high-capacitance/low-leakage organic dielectrics. The resulting transparent flexible TFTs exhibit near-1.0V operating characteristics with a very large field-effect mobility of > 100 cm~2/V·s, and a near-zero threshold voltage. The high performance exhibits a significant improvement over previous organic and metal-oxide-based TFTs, and even rivals that of poly-Si TFTs. In addition, these TFTs exhibit great light- and air-stability when exposed to ambient.