Electroactive Polymer Deformable Micromirrors (EAPDM) for Biomedical Optics

摘要

Electroactive polymers (EAPs) are capable of converting energy in the form of electric charge and voltage to mechanical force and movement and vice versa. Several electroactive polymer actuator materials whose responses are controlled by external electric fields, e.g. poly(vinylidene fluoride-trifluoroethylene) based fluoroterpolymers, have generated considerable interest for use in applications such as artificial muscles, sensors, parasitic energy capture, integrated bio-microelectromechanical systems (BioMEMS) and microfluidic devices due to their high electric-field induced strain, high elastic modulus, high electromechanical coupling and high frequency operation, etc. Scaling the EAP down into microsystems is one of the promising trends of EAP actuators and sensors especially for biomedical engineering. The combination of micro-optics and integrated BioMEMS, referred to as bio-micro-opto-electromechanical systems (BioMOEMS), makes a new opportunity for innovation in the EAP field. We present an approach to the fabrication of low-cost, large-stroke deformable micromirrors based on high performance electroactive polymer film microactuator arrays. Integrated Optic-BioMEMS based on electroactive polymer deformable micromirror (EAPDM) technology provide potential applications in biomedical optics such as ophthalmology (retinal imaging and vision care) and cancer detection and treatment.