Observation of device cross-sectional thin films prepared by FIB usingJEM-2500SE, an electron microscope for nano-analysis

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• 来源
  《Microscopy Society of America annual meeting;Microscopy Society of Canada annual meeting;Societe de Microscopie du Canada annual meeting;Microbeam Analysis Society annual meeting;International Metallographic Society annual meeting》|2002年|1-2|共2页
• 会议地点 Quebec City(CA);Quebec City(CA);Quebec City(CA);Quebec City(CA);Quebec City(CA)
• 作者

  N. Endo; T. Suzuki; E. Okunishi; Y. Kondo; M. Matsushita; M. Osaki;

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• 作者单位

  Application and Research Center JEOL ltd. 1-2 Musashino 3-Chome Akishima Tokyo 196-8558 Japan;

  Electron Optical Division JEOL ltd. 1-2 Musashino 3-Chome Akishima Tokyo196-8558 Japan;

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