ARX Model of Elastic Nuclei for Rotors MEMS

摘要

This work proposes a new procedure to extract characteristic parameters of MEMS structures, using systems identification. The target structures are the nuclei of micro-rotors and the characteristic parameters are the mass, the damping coefficient, and the spring constant. The structures are described in 3D solid model and the behavioral data necessary to the extraction of characteristic parameters, used in macro-models, are obtained through numerical simulations based on finite elements. To parameter extraction were adopted the ARX model and the RLS estimator. Experimental data obtained from three topologies of micro-nuclei, with one degree of freedom, demonstrates satisfactory estimate results when applied to analytical models that the extracted parameters, when applied to analytical models, which motivates the application of other techniques available in the systems identification domain.