We present flexible, ultra-sensitive and mechanically robust H2S gas sensors consisting of ZnO nanowires decorated with palladium (Pd) nanoparticles (NPs) supported by a polyimide substrate. ZnO nanowires were synthesized at desired location via hydrothermal method using local thermal energy generated by microheater array, which is integrated in a device. Also, the surface of ZnO nanowires was modified with Pd NPs by local wet chemical reaction for selective and sensitive detection of H2S gas. The H2S sensing of Pd NP-coated ZnO nanowire sensors was investigated under various measurements including the sensor response/recovery time, bias voltage effects of microheater array, and mechanical loading. The sensing performances of the flexible Pd NP-coated ZnO nanowire sensors were found to be extremely sensitive, reliable and robust for the detection of H2S gas.
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