Observation of stress voids and grain structure in laser-annealed aluminum using focused ion-beam microscopy

摘要

Abstract: A focused ion beam microscope has been used to image the grains as well as voids formed in Al-1%Cu/TiW fine line conductors. Void formation has been compared between laser-annealed Al and nonlaser-annealed Al, and it has been shown that the laser- annealed Al is more prone to voiding. A TiW layer placed over the Al is effective in suppressing the voids. !7