National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing, China, Microsystem Research Center of Chongqing University, Chongqing, China;
National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing, China, Microsystem Research Center of Chongqing University, Chongqing, China;
National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing, China, Microsystem Research Center of Chongqing University, Chongqing, China;
MOEMS micromirror; angle sensor; PZT; microactuator;
机译:基于ALN薄膜的压电大孔径MEMS扫描微镜与角度传感器集成
机译:具有大扫描角度的PZT致动和感应谐振微镜,采用机械杠杆放大技术进行双轴扫描
机译:用于驱动2D扫描微镜的压电PZT束致动器的特性
机译:压电致动扫描微镜与角度传感器集成
机译:用于医学成像应用的电热致动双轴扫描微镜。
机译:集成了角度传感器的基于FR4的电磁扫描微镜
机译:基于压电薄膜铝氮化铝,具有大扫描角度和单片综合角度传感器的2D扫描微镜