MODELING AND FABRICATION OF A MICRO THERMOCOUPLE ARRAY

摘要

A prototype micro thermocouple array, to detect the temperature change within the neighborhood of a single cell, was produced as a proof of concept. Thermal modeling was performed to determine feasibility of the design and parametrically evaluate dimensions. The device consisted of a 3 × 3 array of type-T thermocouple junctions (copper and constantan), spaced 50 μm apart. A micro-fabricated wiring layer, intermediate post layer, and connecting junction layer were used. The intermediate post layer was designed to decrease the effect of the thermocouple wiring layer on the cell freezing response.